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10424-65-4
bosschem
10424-65-4
Tetramethylammonium hydroxide pentahydrate (TMAOH pentahydrate) is a highly basic quaternary ammonium salt. Primarily used as an ion-pairing agent in analytical chemistry and an etchant/developer in the semiconductor industry, it features the chemical formula (CH₃)₄N(OH) ⋅ 5H₂O and a molecular weight of 181.23 g/mol.
Item | Specification | Result |
Appearance | White Crystal | White Crystal |
Assay(%) | ≥98% | 99.39% |
CO3(Carbonate) | ≤0.5% | 0.06% |
Al | ≤1ppm | 0.11 |
Cd | ≤1ppm | <0.1 |
Ca | ≤1ppm | 0.10 |
Cr | ≤1ppm | 0.25 |
Co | ≤1ppm | <0.1 |
Cu | ≤1ppm | <0.1 |
Fe | ≤1ppm | 0.78 |
Pb | ≤1ppm | <0.1 |
Li | ≤1ppm | <0.1 |
Mg | ≤1ppm | 0.26 |
Mn | ≤1ppm | <0.1 |
Ni | ≤1ppm | <0.1 |
K | ≤1ppm | <0.1 |
Ag | ≤1ppm | <0.1 |
Na | ≤1ppm | 0.21 |
Zn | ≤1ppm | 0.1 |
Electronic Grade
1. Electronic and Semiconductor Micro/Nano Fabrication
Ultra-High Purity Anisotropic Silicon Etcher: In the etching process of single-crystal silicon, TMAH is a metal-ion-free (MIF) developer and etchant. Using pentahydrate crystallization allows for the precise preparation of high-purity solutions free of specific trace metal impurities, preventing alkali metal ions such as sodium and potassium from damaging the electrical performance of semiconductor devices.
Photoresist Development: In the positive photoresist development process of integrated circuit manufacturing, the developer prepared with it provides high resolution and no substrate contamination.
2. Phase Transfer Catalyst
Organosilicon Cyclic Ring-Opening Polymerization: In the production of polymer silicone oils and silicone rubbers, pentahydrate TMAH is an excellent catalyst. Its high catalytic activity allows for easy removal of catalyst residues without complex washing processes, significantly improving the electrical insulation and heat resistance of organosilicon products.
3. Advanced Materials and Nanotechnology Synthesis - Structure-Directing Agents
Molecular Sieves and Zeolite Synthesis: Used to synthesize microporous or mesoporous molecular sieves with specific pore sizes (such as certain types of zeolite). It acts as a structural template agent, guiding the directional crystallization of aluminosilicates around it; after sintering and removal, regular nanopores remain.
Magnetic Fluid (Nanoferrite) Modification: In the preparation of nanoscale magnetic fluids such as Fe3O4, TMAH pentahydrate is commonly used as a surface modifier or dispersant stabilizer to prevent the aggregation of nanoparticles.
Production capacity: 200 tons/year; Packaging: Crystalline hydrate plastic drum, net weight 25 kg
